Author(s): Johan B C Engelen, Leon Abelmann and Miko C ElwenspoekAffiliation(s): MESA+ Institute for Nanotechnology, University of Twente, Enschede, The Netherlands; Freiburg Institute for Advanced Studies (FRIAS), Albert-Ludwigs-Universitat Freiburg, Freiburg im Breisgau, Germany
Read »Optimized comb-drive finger shape for shock-resistant actuation
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